Blank Cover Image

STRESS EFFECT ON OXIDATION KINETICS OF SILICON WITH DIFFERENT SURFACE ORIENTATIONS

著者名:
掲載資料名:
Thin films : stresses and mechanical properties III : symposium held December 2-5, 1991, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
239
発行年:
1992
開始ページ:
107
終了ページ:
112
総ページ数:
6
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991330 [1558991336]
言語:
英語
請求記号:
M23500/239
資料種別:
国際会議録

類似資料:

1 国際会議録 Oxide Surface Roughness During Stepwise Wet Etching of Fowler-Nordheim Stressed Silicon Dioxide Films

Yamabe, K., Liao, K., Murata, M.

Electrochemical Society
7 国際会議録 EFFECT OF COPPER FILM THICKNESS ON STRESS AND STRAIN IN GRAINS OF DIFFERENT ORIENTATION

Vinci, R. P., Zielinski, E. M., Bravman, J. C.

MRS - Materials Research Society
2 国際会議録 Effect of Silicon Surface Orientation on Very Oxide Reliability

T. Ohmi, K. Matsumoto, K. Nakamura

Electrochemical Society
8 国際会議録 The Effect of Carbon in Silicon on Oxidation Kinetics and Silicon Dioxide Integrity

Ridley, R.S., Brozek, T., Ruzyllo, J.

Electrochemical Society
3 国際会議録 Auto Feeding Epitaxial Growth of Oxide Thin Film without Oxidant

Shimoyama, Kazuo, Kubo, Kousuke, Maeda, Tatsuro, Yamabe, Kikuo

Materials Research Society
9 国際会議録 Carbonization Study of Different Silicon Orientations

A. Severino, C. Bongiorno, S. Leone, M. Mauceri, G. Pistone, G. Condorelli, G. Abbondanza, F. Portuese, G. Foti, F. La …

Trans Tech Publications
4 国際会議録 ATTAINING CLEAN SILICON SURFACES THROUGH PROTECTIVE OXIDATION AND HYDROGEN TERMINATION

Mayusumi, M., Imai, M., Nakahara, S., Inoue, K.

Electrochemical Society
10 国際会議録 (181d) Orientational Ordering and Stress Transmission in Packings of Straight or Curved Spherocylinders with Different Surface Roughness

Guang Lu, James Third, Christoph Mueller

American Institute of Chemical Engineers
5 国際会議録 EFFECT OF OXIDE THICKNESS ON DIELECTRIC BREAKDOWN INDUCED BY SURFACE COP

Yamabe, K., Shimada, Y., Piao, M., Yarnazaki, T., Otsuki, T., Takeda, R., Obta, Y., Jimbo, S., Watanabe, M.

Electrochemical Society
11 国際会議録 ARSENIC DIFFUSION AND PRECIPITATION AT AsSG/Si INTERFACE

Tsunashima, Yoshitaka, Kasio, Takako, Kawaguchi, Hideichi, Onga, Shinji, Yamabe, Kikuo

Materials Research Society
6 国際会議録 EFFECT OF OXIDE THICKNESS ON DIELECTRIC BREAKDOWN INDUCED BY SURFACE COP

Yamabe, K., Shimada, Y., Piao, M., Yarnazaki, T., Otsuki, T., Takeda, R., Obta, Y., Jimbo, S., Watanabe, M.

Electrochemical Society
12 国際会議録 Effect of Grain Size on Oxidation Resistance of Unalloyed Titanium

Y. Yang, T. Kitashima, T. Hara, Y. Hara, Y. Yamabe-Mitarai

Trans Tech Publications
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12