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Plasma etching processes for sub-quarter micron devices : proceedings of the international symposium. pp.226-232, 1999. Pennington, NJ. Electrochemical Society
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出版情報:
Phase transformations and systems driven far from equilibrium : symposium held December 1-5, 1997, Boston, Massachusetts, U.S.A.. pp.521-, 1998. Warrendale, Pa.. MRS - Materials Research Society