Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A.. pp.313-318, 1992. Pittsburgh, Pa.. Materials Research Society
Sugiura, Jun ; Ogasawara, Makoto ; Uedono, Akira ; Wei, Long ; Tanigawa, Shoichiro
出版情報:
Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A.. pp.1055-1060, 1992. Pittsburgh, Pa.. Materials Research Society