Kittl, J.A. ; Reitano, R. ; Aziz, M.J. ; Brunco, D.P. ; Thompson, M.O.
出版情報:
Beam-solid interactions : fundamentals and applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.. pp.691-698, 1993. Pittsburgh, Pa.. Materials Research Society
ULSI science and technology, 1995 : proceedings of the Fifth International Symposium on Ultra Large Scale Integration Science and Technology. pp.177-186, 1995. Pennington, NJ. Electrochemical Society
ULSI science and technology, 1995 : proceedings of the Fifth International Symposium on Ultra Large Scale Integration Science and Technology. pp.145-152, 1995. Pennington, NJ. Electrochemical Society