Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A.. pp.645-650, 2002. Warrendale. Materials Research Society
Materials, technology and reliability for advanced interconnects and low-k dielectrics : symposium held April 23-27, 2000, San Francisco, California, U.S.A.. pp.D10.2/G7.2-, 2001. Warrendale, PA. Materials Research Society
Materials, technology and reliability of advanced interconnects - 2005 : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A.. pp.271-276, 2005. Warrendale, Pa.. Materials Research Society
Gan, C.L. ; Thompson, C.V. ; Pey, K.L. ; Choi, W.K. ; Wei, F. ; Yu, B. ; Hau-Riege, S.P.
出版情報:
Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A.. pp.431-438, 2002. Warrendale. Materials Research Society
Hau-Riege, S.P. ; Thompson, C.V. ; Hau-Riege, C.S. ; Andleigh, V.K. ; Chery, Y. ; Troxel, D.
出版情報:
Materials, technology and reliability for advanced interconnects and low-k dielectrics : symposium held April 23-27, 2000, San Francisco, California, U.S.A.. pp.D2.2-, 2001. Warrendale, PA. Materials Research Society
Materials, technology and reliability for advanced interconnects and low-k dielectrics : symposium held April 23-27, 2000, San Francisco, California, U.S.A.. pp.D2.8-, 2001. Warrendale, PA. Materials Research Society
Materials, technology and reliability for advanced interconnects and low-k dielectrics : symposium held April 23-27, 2000, San Francisco, California, U.S.A.. pp.D8.7-, 2001. Warrendale, PA. Materials Research Society
Materials, technology and reliability for advanced interconnects and low-k dielectrics - 2004 : symposium held April 13-15, 2004, San Francisco, California, U.S.A.. pp.373-378, 2004. Warrendale. Materials Research Society
Materials, technology and reliability for advanced interconnects and low-k dielectrics - 2004 : symposium held April 13-15, 2004, San Francisco, California, U.S.A.. pp.339-344, 2004. Warrendale. Materials Research Society