Chu, S. N. G. ; Katz, A. ; Boone, T. ; Thomas, P. M. ; Riggs, V. G. ; Dautremont-Smith, W. C. ; Johnson Jr., W. D.
出版情報:
Advanced metallizations in microelectronics : symposium held April 16-20, 1990, San Francisco, California, U.S.A.. pp.389-400, 1990. Pittsburgh, Pa.. Materials Research Society
Katz, A. ; Dautremont-Smith, W. C. ; Chu, S. N. G. ; Pearton, S. J. ; Geva, M. ; Weir, B. E. ; Thomas, P. M. ; Kimerling, L. C.
出版情報:
Advanced metallizations in microelectronics : symposium held April 16-20, 1990, San Francisco, California, U.S.A.. pp.401-410, 1990. Pittsburgh, Pa.. Materials Research Society