Tamboli, D.C. ; Desai, V.H. ; Dogariu, A. ; Sundaram, K.B. ; Maury, A. ; Obeng, Y.
出版情報:
Proceedings of the Second International Symposium on Chemical Mechanical Planariarization [sic] in Integrated Circuit Device Manufacturing. pp.206-217, 1998. Pennington, N. J.. Electrochemical Society
Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films. pp.143-152, 1997. Pennington, New Jersey. Electrochemical Society
Proceedings of the third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films. pp.198-207, 1994. Pennington, NJ. Electrochemical Society