1.

国際会議録

国際会議録
Schulze,H.-J.
出版情報: Analytical and diagnostic techniques for semiconductor materials, devices and processes : joint proceedings of the symposia on ALTECH 99, satellite symposium to ESSDERC 99, Leuven, Belgium [and] the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices.  pp.271-288,  1999.  Pennington, N.J..  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3895
2.

国際会議録

国際会議録
Zoth,G. ; Geyer,S. ; Schulze,H.-J.
出版情報: Analytical and diagnostic techniques for semiconductor materials, devices and processes : joint proceedings of the symposia on ALTECH 99, satellite symposium to ESSDERC 99, Leuven, Belgium [and] the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices.  pp.5-20,  1999.  Pennington, N.J..  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3895
3.

国際会議録

国際会議録
Schulze,H.-J. ; Deboy,G.
出版情報: Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing II.  pp.234-245,  1995.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 2638