1.

国際会議録
国際会議録
1. THERMAL WAVE AND LIGHTSCATTERING MEASUREMENTS ON DIFFERENTLY PROCESSED Si-WAFERS
Gerlach, P. ; Hahn, P.O. ; Schnegg, A. ; Alpern, A. ; Menzel, G.
出版情報: Characterization of the structure and chemistry of defects in materials : symposium held November 28-December 3, 1988, Boston, Massachusetts, U.S.A..  pp.267-272,  1989.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 138
2.

国際会議録
国際会議録
2. EFFECTS IN SILICON EXPLAINED BY ATOMIC HYDROGEN
Schnegg, A. ; Prigge, H. ; Grundner, M. ; Hahn, P. O. ; Jacob, H.
出版情報: Defects in electronic materials : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A..  pp.291-296,  1988.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 104
3.

国際会議録
国際会議録
3. SUBMICRON ROUGHNESS DETERMINATION AT THE Si-Si02 INTERFACE AND CORRELATIONS TO PROCESSING STEPS AND ELECTRONIC PROPERTIES
Hahn, Peter O. ; Lampert, I. ; Schnegg, A.
出版情報: SiO[2] and its interfaces : symposium held November 30-December 5, 1987, Boston, Massachusetts, U.S.A..  pp.247-252,  1988.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 105