Yang, J. ; Yamada, N. ; Ventzek, P.L.G. ; Sakai, Y. ; Date, H. ; Tagashira, H. ; Kitamori, K.
出版情報:
Proceedings of the Second International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing. pp.233-244, 1997. Pennington, NJ. Electrochemical Society