1.

国際会議録
国際会議録
1. Diamondlike Carbon Materials as Low-k Dielectrics for Multilevel Interconnects in ULSI
Grill, A. ; Patel, V. ; Saenger, K. L. ; Jahnes, C. ; Cohen, S. A. ; Schrott, A. G. ; Edelstein, D. C. ; Paraszczak, J. R.
出版情報: Low-dielectric constant materials II : symposium held December 2-3, 1996, Boston, Massachusetts, U.S.A..  pp.155-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 443
2.

国際会議録
国際会議録
2. In Situ X-ray Diffraction Analysis of TiSi2 Phase Formation From a Titanium-Molybdenum Bilayer
Cabral, C., Jr. ; Clevenger, L. A. ; Harper, J. M. E. ; Roy, R. A. ; Saenger, K. L. ; Miles, G. L. ; Mann, R. W.
出版情報: Thin films - structure and morphology : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A..  pp.295-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 441