1.

国際会議録
国際会議録
1. Design and sensitivity optimization of vibration sensors for tool-state monitoring
Thomas,J.S. ; Kuhnhold,R. ; Ryssel,H.
出版情報: Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France.  Part1  pp.423-431,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3680
2.

国際会議録
国際会議録
2. Equipment and wafer modeling of batch furnaces by neural networks
Benesch,N. ; Schneider,C. ; Lehnert,W. ; Pfitzner,L. ; Ryssel,H.
出版情報: Process and equipment control in microelectronic manufacturing : 19-20 May 1999, Edinburgh, Scotland.  pp.2-12,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3742
3.

国際会議録
国際会議録
3. Application and cost analysis of scatterometry for integrated metrology
Benesch,N. ; Schneider,C. ; Pfitzner,L. ; Ryssel,H.
出版情報: In-line characterization, yield reliability, and failure analysis in microelectronics manufacturing : 19-21 May 1999, Edinburgh, Scotland.  pp.25-32,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3743
4.

国際会議録
国際会議録
4. Ultra-Shallow N+P and P+N Junction Formation Using Low Energy High Dose As+ and BF2+ Implantation and Rapid Thermal Anneal
Kal,S. ; Kasko,I. ; Ryssel,H.
出版情報: Semiconductor Devices.  pp.487-489,  1996.  Bellingham, WA, New Delhi.  SPIE-The International Society for Optical Engineering — Narosa
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 2733
5.

国際会議録
国際会議録
5. Advanced process control system for vertical furnaces
Berger,R. ; Schneider,C. ; Lehnert,W. ; Pfitzner,L. ; Ryssel,H.
出版情報: Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II.  pp.16-26,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 2876