Yield enhancement in micromechanical sensor fabrication using statistical process control
- 著者名:
- Borenstein,J.T. ( Charles Stark Draper Lab.,Inc. )
- Preble,D.M. ( Charles Stark Draper Lab.,Inc. )
- 掲載資料名:
- Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3223
- 発行年:
- 1997
- 開始ページ:
- 276
- 終了ページ:
- 283
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819426550 [0819426555]
- 言語:
- 英語
- 請求記号:
- P63600/3223
- 資料種別:
- 国際会議録
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