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Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A.. pp.213-, 1999. Warrendale, PA. MRS - Materials Research Society
Lin, X. W. ; Ibrahim, N. ; Topete, L. ; Pramanik, D.
出版情報:
Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.179-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Lin, X. W. ; Hui, K. ; Chanderhari, K. ; Bothra, S. ; Pramanik, D. ; Findley, P.
出版情報:
Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.399-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Rapid thermal and integrated processing V : symposium held April 8-12, 1996, San Francisco, California, U.S.A.. pp.181-, 1996. Pittsburgh, PA. MRS - Materials Research Society
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