Colombeau, B. ; Smith, A.J. ; Cowern, N.E.B. ; Pawlak, B.J. ; Cristiano, F. ; Duffy, R. ; Claverie, A. ; Ortiz, C.J. ; Pichler, P. ; Lampin, E. ; Zechner, C.
出版情報:
Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A.. pp.91-102, 2004. Warrendale, Pa.. Materials Research Society
Scalese, S. ; Magna, A. La ; Mannino, G. ; Privitera, V. ; Bersani, M. ; Giubertoni, D. ; Solmi, S. ; Pichler, P.
出版情報:
CMOS front-end materials and process technology : symposium held April 22-24, 2003, San Francisco, California, U.S.A.. pp.205-210, 2003. Warrendale, Pa.. Materials Research Society