Low contact resistivity Mn/Au/Ti/Pd/Au P-ohmic contacts for HBTs

Low contact resistivity Mn/Au/Ti/Pd/Au P-ohmic contacts for HBTs

著者名:

掲載資料名:

III-V electronic and photonic device fabrication and performance : symposium held April 12-15, 1993, San Francisco, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

300

発行年:

1993

開始ページ:

243

出版情報:

Pittsburgh, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558991965 [1558991964]

言語:

英語

請求記号:

M23500/300

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00020790
シリーズID:	PA00000011
会議名:	Symposium on electronic and photonic device fabrication and performance
回次:	1993
会議開催地:	San Francisco, CA, USA
会議開催年:	1993.04.12-1993.04.15

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2 国際会議録 A Microstructural and Electrical Investigation of Pd/Ge/Ti/Au Ohmic Contact to n-Type GaAs Kwak, J. S., Baik, H. K., Kim, H., Lee, J.-L., Shin, D. W., Park, C. G. MRS - Materials Research Society	8 国際会議録 BACKSIDE SIMS STUDY OF Ge/Pd NON-ALLOYED OHMIC CONTACTS ON InGaAs Schwarz, S. A., Palmstrom, C. J., Bhat, R., Koza, M., Wang, L. C., Park, M. H. MRS - Materials Research Society
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