Ebihara, T. ; Saito, H. ; Miyaharu, T. ; Okada, S. ; Shiode, Y. ; Shiozawa, T. ; Yoshihara, T.
出版情報:
Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA. pp.1693-1703, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Okada, S. ; Yamamoto, H. ; Matsukura, I. ; Shirota, N. ; Ishibashi, Y. ; Sasaki, H. ; Higashikawa, I. ; Wakamiya, W.
出版情報:
Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA. pp.1320-1328, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Perez-Moreno, J. ; Asselberghs, I. ; Zhao, Y. ; Song, K. ; Nakanishi, H. ; Okada, S. ; Nogi, K. ; Kim, O. -K. ; Je, J. ; Matrai, J. ; De Maeyer, M. ; Kuzyk, M. G. ; Clays, K.
出版情報:
Linear and Nonlinear Optics of Organic Materials V. pp.59350B-, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering