Erickson, J.W. ; Brock, R. ; Killian, A. ; Johnston, G. ; Trotter, D. ; Nouri, F.
出版情報:
Silicon nitride and silicon dioxide thin insulating films, proceedings of the fifth International Symposium. pp.155-166, 1999. Pennington, New Jersey. Electrochemical Society
Rubin, M. E. ; Saha, S. ; Lutze, J. ; Nouri, F. ; Scott, G. ; Pramanik, D.
出版情報:
Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A.. pp.213-, 1999. Warrendale, PA. MRS - Materials Research Society
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