Semiconductor surface characterization by scanning probe microscopies
- 著者名:
- Hietschold,M. ( Chemnitz Univ. of Technology )
- Muller,A.-D.
- Muller,F.
- 掲載資料名:
- International Conference on Solid State Crystals 2000: Growth, Characterization, and Applications of Single Crystals
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4412
- 発行年:
- 2000
- 開始ページ:
- 191
- 終了ページ:
- 195
- 総ページ数:
- 5
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819441157 [0819441155]
- 言語:
- 英語
- 請求記号:
- P63600/4412
- 資料種別:
- 国際会議録
類似資料:
Society of Photo-optical Instrumentation Engineers |
7
国際会議録
THREE DIMENSIONAL CHARACTERIZATION OF INTERFACES IN SEMICONDUCTORS BY SCANNING ELECTRON MICROSCOPY
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