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Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia. pp.92-99, 1999. Pennington, N.J.. Electrochemical Society
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出版情報:
Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11. pp.1409-1416, 1997. Pennington, NJ. Electrochemical Society
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出版情報:
Materials science of microelectromechanical systems (MEMS) devices : symposium held December 1-2, 1998, Boston, Massachusetts, U.S.A.. pp.91-96, 1999. Warrendale, Pa.. Materials Research Society