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Low-energy focused ion-beam system for direct deposition

著者名:
掲載資料名:
Electron-beam sources and charged-particle optics : 10-14 July 1995, San Diego, California
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
2522
発行年:
1996
開始ページ:
396
終了ページ:
405
総ページ数:
10
出版情報:
Bellingham, WA: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819418814 [0819418811]
言語:
英語
請求記号:
P63600/2522
資料種別:
国際会議録

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