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Control of stresses in highly doped multilayer polysilicon structures used in MEMS applications

著者名:
掲載資料名:
Smart materials
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4234
発行年:
2000
開始ページ:
232
終了ページ:
238
総ページ数:
7
出版情報:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819439086 [0819439088]
言語:
英語
請求記号:
P63600/4234
資料種別:
国際会議録

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