Materials issues in silicon integrated circuit processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A.. pp.449-454, 1986. Pittsburgh, Pa.. Materials Research Society
Kwong, D.L. ; Ku, Y.H. ; Lee, S.K. ; Alvi, N.S. ; Chu, P. ; Zhou, Y. ; White, J.M.
出版情報:
Materials issues in silicon integrated circuit processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A.. pp.379-386, 1986. Pittsburgh, Pa.. Materials Research Society