1.

国際会議録
国際会議録
1. Coated optics for DUV-excimer laser applications
Ullmann,J. ; Mertin,M. ; Lauth,H. ; Bernitzki,H. ; Mann,K. ; Ristau,D. ; Arens,W. ; Thielsch,R. ; Kaiser,N.
出版情報: Laser-induced damage in optical materials, 1999 : 31th Annual Boulder Damage Symposium, proceedings, 4-7, October, 1999, Boulder, Colorado.  pp.514-527,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3902
2.

国際会議録
国際会議録
2. Properties of fluoride DUV excimer laser optics:influence of the number of dielectric layers
Arens,W. ; Ristau,D. ; Ullmann,J. ; Zaczek,C. ; Thielsch,R. ; Kaiser,N. ; Duparre,A. ; Apel,O. ; Mann,K.R. ; Lauth,H. ; Bernitzki,H. ; Ebert,J. ; Schippel,St. ; Heyer,H.
出版情報: Laser-induced damage in optical materials, 1999 : 31th Annual Boulder Damage Symposium, proceedings, 4-7, October, 1999, Boulder, Colorado.  pp.250-259,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3902
3.

国際会議録
国際会議録
3. Extreme ultraviolet light generation based on laser-produced plasmas(LPP)and gas-discharge-based pinch plasmas:a comparison of different concepts
Schriever,G. ; Rahe,M. ; Neff,W. ; Bergmann,K. ; Lebert,R. ; Lauth,H. ; Basting,D.
出版情報: Emerging lithographic technologies IV : 28 February-1 March 2000, Santa Clara, USA.  pp.162-168,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3997
4.

国際会議録
国際会議録
4. Extreme-ultraviolet source development: a comparison of different concepts
Dusterer,S. ; Rahe,M. ; Rebhan,U. ; Basting,D. ; Walecki,W.J. ; Lauth,H. ; Lebert,R. ; Bergmann,K. ; Hoffmann,D. ; Rosier,O. ; Neff,W. ; Poprawe,R. ; Sauerbrey,R.A. ; Schwoerer,H. ; Ziener,C. ; Nickles,P.V. ; Stiehl,H. ; Will,I. ; Sandner,W.
出版情報: Soft X-ray and EUV imaging systems : 3-4 August 2000, San Diego, USA.  pp.113-120,  2000.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 4146
5.

国際会議録
国際会議録
5. Long-time radiation-resistant optical coatings for UV excimer laser applications
Laux,S. ; Bernitzki,H. ; Klaus,M. ; Lauth,H. ; Kaiser,N.
出版情報: Laser-induced damage in optical materials, 2000 : 32nd Annual Boulder Damage Symposium, proceedings, 16-18, October, 2000, Boulder, Colorado.  pp.13-16,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 4347