1.

国際会議録
国際会議録
1. Accurate proximity correction method with total-process proximity-based correction factor(TCF)
Hashimoto,K. ; Usui,S. ; Hasebe,S. ; Murota,M. ; Nakayama,T. ; Matsuoka,F. ; Inoue,S. ; Kobayashi,S. ; Yamamoto,K.
出版情報: Optical microlithography XI : 25-27 February 1998, Santa Clara, California.  pp.224-233,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3334
2.

国際会議録
国際会議録
2. MD1:Optical disk system for digital video recording.
Narahara,T. ; Kobayashi,S. ; Hattori,M. ; Shimpuku,Y. ; Enden,G.van den ; Kahlman,J.A. ; Dijk,M.van ; Woudenberg,R.van
出版情報: ISOM/ODS '99 : joint international symposium on Optical Memory and Optical Data Strage 1999, 11-15 July 1999 Sheraton Kauai Resort, Koloa, Howaii.  pp.50-52,  1999.  Bellingham, Washington.  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3864
3.

国際会議録
国際会議録
3. Development of simplified process for KrF excimer halftone mask with chrome-shielding method
Kobayashi,S. ; Oka,N. ; Watanabe,K. ; Ohmori,K. ; Inoue,M. ; Iguchi,K.
出版情報: 19th Annual Symposium on Photomask Technology : 15-17 September 1999, Monterey, California.  Part1  pp.288-296,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3873
4.

国際会議録
国際会議録
4. 1- kW slab CO2 laser excited by a self-excited rf generator
Kobayashi,S. ; Terai,K. ; Tamangawa,T.
出版情報: XI International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference : 25-30 August 1996, Heriot-Watt University, Edinburgh, UK.  pp.92-95,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3092
5.

国際会議録
国際会議録
5. Hierarchical processing for accurate optical proximity correction for 1-Gb DRAM metal layers
Kobayashi,S. ; Uno,T. ; Yamamoto,K. ; Tanaka,S. ; Kotani,T. ; Inoue,S. ; Higurashi,H. ; Watanabe,S. ; Yano,M. ; Ohki,S. ; Tsunakawa,K.
出版情報: Optical microlithography XII : 17-19 March 1999, Santa Clara, California.  Part2  pp.614-621,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3679
6.

国際会議録
国際会議録
6. Morphology of Oxide Precipitates in Czochralski Silicon Crystals
Sueoka,K. ; Ikeda,N. ; Yamamoto,T. ; Kobayashi,S.
出版情報: Shallow Impurities in Semiconductors : Proceedings of the Fifth International Conference on Shallow Impurities in Semiconductors "Physics and Control of Impurities", International Conference Center Kobe, Japan, 5 to 8 August, 1992.  pp.523-524,  1993.  Aedermannsdorf, Switzerland.  Trans Tech Publications
シリーズ名: Materials science forum
シリーズ巻号: 117-118
7.

国際会議録
国際会議録
7. Generation of Oxidation Induced Stacking Faults in CZ Silicon Wafers
Sueoka,K. ; Akatsuka,M. ; Nishihara,K. ; Yamamoto,T. ; Kobayashi,S.
出版情報: Proceedings of the 18th International Conference on Defects in Semiconductors : ICDS-18, Sendai, Japan, July 23-28, 1995.  pp.1737-1742,  1995.  Zurich, Switzerland.  Trans Tech Publications
シリーズ名: Materials science forum
シリーズ巻号: 196-201
8.

国際会議録
国際会議録
8. High Quality Powder Production of MA Amorphous TiAl System by Reaction Ball Milling
Kobayashi,S. ; Kimura,H.
出版情報: Mechanical alloying : proceedings of the International Symposium on Mechanical Alloying held in Kyoto, Japan, May 7-10, 1991.  pp.97-104,  1992.  Zurich.  Trans Tech Publications
シリーズ名: Materials science forum
シリーズ巻号: 88-90
9.

国際会議録
国際会議録
9. Visualization of laser-induced fluorescence of plants influenced by environmental stress with a microfluorescence imaging system and a fluorescence imaging lidar system
Saito,Y. ; Takahashi,K. ; Nomura,E. ; Mineuchi,K. ; Kawahara,T.D. ; Nomura,A. ; Kobayashi,S. ; Ishii,H.
出版情報: Advances in laser remote sensing for terrestrial and oceanographic applications : 21-22 April 1997, Orlando, Florida.  pp.190-198,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3059
10.

国際会議録
国際会議録
10. Side-chain-polymer-stabilized ferroelectric liquid crystal display exhibiting fast response speed,high contrast ratio,and monostability with gray-scale capability (Invited Paper)
Kobayashi,S. ; Furue,H.
出版情報: Display technologies II : 9-11 July 1998, Taipei, Taiwan.  pp.2-7,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3421