Enhanced hydrogenation in polycrystalline Si thin films using ultrasound treatment

Enhanced hydrogenation in polycrystalline Si thin films using ultrasound treatment

著者名:

Ostapenko,S. ( Univ.of South Florida )
Koshka,Y.
Jastrzebski,L.
Smeltzer,R.K.

掲載資料名:

Active matrix liquid crystal displays technology and applications : 10-11 February, 1997, San Jose, California

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

3014

発行年:

1997

開始ページ:

176

終了ページ:

183

出版情報:

Bellingham, Washington: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819424259 [0819424250]

言語:

英語

請求記号:

P63600/3014

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00017976
シリーズID:	PA00000029
会議名:	IS&T/SPIE Electronic Imaging : Active matrix liquid crystal displays technology and applications
回次:	1997
会議開催地:	San Jose, CA, USA
会議開催年:	1997.02.10-1997.02.11

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