1.

国際会議録
国際会議録
1. EFFECTS OF RESIDUAL IRON CONTAMINATION INTRODUCED DURING WET CHEMICAL PROCESSING ON THIN OXIDE BREAKDOWN AND RELIABILITY CHARACTERISTICS
Henley, W.B. ; Jastrzebski, L. ; Haddad, N.F.
出版情報: Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.487-494,  1994.  Pennington, NJ.  Electrochemical Society
シリーズ名: Electrochemical Society Proceedings Series
シリーズ巻号: 1994-7
2.

国際会議録
国際会議録
2. HEAVY METAL AND ORGANIC CLEANING EFFICIENCY OPTIMIZATION AND MONITORING FOR REAL-TIME, IN-LINE PROCESS CONTROL BY SURFACE PHOTOVOLTAGE
Jastrzebski, L. ; Henley, W. ; DeBusk, D. ; Haddad, N. ; Lowell, J. ; Wenner, V. ; Nauka, K. ; Persson, E.
出版情報: Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.530-536,  1994.  Pennington, NJ.  Electrochemical Society
シリーズ名: Electrochemical Society Proceedings Series
シリーズ巻号: 1994-7
3.

国際会議録
国際会議録
3. Effect of Metal Underlayer on Plasma Induced Charging
Karzhavin, Y. ; Wu, W. ; Findlay, A. ; Jastrzebski, L.
出版情報: Proceedings of the International Symposium on Thin Film Materials, Processes, Reliability, and Applications, Thin Film Processes.  pp.183-194,  1997.  Pennington, NJ.  Electrochemical Society
シリーズ名: Electrochemical Society Proceedings Series
シリーズ巻号: 97-30
4.

国際会議録
国際会議録
4. A Novel Method for Studying Degradation Related to Plasma Processing of Silicon Wafers
Lagowski, J. ; Hoff, A. ; Jastrzebski, L. ; Edelman, P. ; Esry, T.
出版情報: Materials reliability in microelectronics VI : symposium held April 8-12, 1996, San Francisco, California, U.S.A..  pp.437-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 428
5.

国際会議録
国際会議録
5. A New, Real-Time Method for Measuring Mobile Charge and Injected Charge in SiO2 on Si
Edelman, P. ; Lagowski, J. ; Savchouk, A. ; Hoff, A. ; Jastrzebski, L. ; Persson, E.
出版情報: Materials reliability in microelectronics VI : symposium held April 8-12, 1996, San Francisco, California, U.S.A..  pp.443-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 428
6.

国際会議録
国際会議録
6. Enhanced Hydrogenation Due to Ultrasound Treatment in Polycrystalline Silicon: New Approach to Thin Film Defect Engineering
Ostapenko, S. ; Henley, W. ; Karimpanakkel, S. ; Jastrzebski, L. ; Lagowski, J.
出版情報: Defect and impurity engineered semiconductors and devices : symposium held April 17-21, 1995, San Francisco, California, U.S.A..  pp.405-,  1995.  Pittsburgh, PA.  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 378
7.

国際会議録
国際会議録
7. Improvement of Polysilicon Thin Films and Thin-Film Transistors Using Ultrasound Treatment
Ostapenko, S. ; Jastrzebski, L. ; Lagowski, J. ; Smeltzer, R. K.
出版情報: Flat panel display materials II : symposium held April 8-12, 1996, San Francisco, California, U.S.A..  pp.201-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 424
8.

国際会議録
国際会議録
8. Surface Photovoltage Characterization of Low Temperature Annealed LPCVD Silicon on Glass
Sen, S. ; Hoff, A.M. ; Moradi, B. ; Lagowski, J. ; Jastrzebski, L.
出版情報: Proceedings of the Second Symposium on Thin Film Transistor Technologies.  pp.269-278,  1994.  Pennington, NJ.  Electrochemical Society
シリーズ名: Electrochemical Society Proceedings Series
シリーズ巻号: 1994-35
9.

国際会議録
国際会議録
9. Analysis of Hydrogenation in Thin Film Polycrystalline Silicon Using Surface Photovoltage Measurement Technique
Henley, W. ; Ostepenko, S. ; Karimpanakkel, S. ; Jastrzebski, L. ; Lagowski, J.
出版情報: Proceedings of the Second Symposium on Thin Film Transistor Technologies.  pp.265-268,  1994.  Pennington, NJ.  Electrochemical Society
シリーズ名: Electrochemical Society Proceedings Series
シリーズ巻号: 1994-35
10.

国際会議録
国際会議録
10. Enhanced Hydrogenation of Interface Bulk and Surface Traps in Polycrystalline Silicon Thin Films Subjected to Ultrasound Treatment
Ostapenko, S. ; Karimpanakkel, S. ; Jastrzebski, L. ; Lagowski, J.
出版情報: Proceedings of the Second Symposium on Thin Film Transistor Technologies.  pp.61-67,  1994.  Pennington, NJ.  Electrochemical Society
シリーズ名: Electrochemical Society Proceedings Series
シリーズ巻号: 1994-35