Jastrzebski, L. ; Henley, W. ; DeBusk, D. ; Haddad, N. ; Lowell, J. ; Wenner, V. ; Nauka, K. ; Persson, E.
出版情報:
Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.530-536, 1994. Pennington, NJ. Electrochemical Society
Ostapenko, S. ; Henley, W. ; Karimpanakkel, S. ; Jastrzebski, L. ; Lagowski, J.
出版情報:
Defect and impurity engineered semiconductors and devices : symposium held April 17-21, 1995, San Francisco, California, U.S.A.. pp.405-, 1995. Pittsburgh, PA. MRS - Materials Research Society