Rubio, J. Emiliano ; Jaraiz, Martin ; Bailon, Luis, A. ; Barbolla, Juan ; Lopez, M. Jose ; Gilmer, George H.
出版情報:
Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.127-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Jaraiz, Martin ; Pelaz, Lourdes ; Rubio, Emiliano ; Barbolla, Juan ; Gilmer, George H. ; Eaglesham, David J. ; Gossmann, Hans J. ; Poate, John M.
出版情報:
Silicon front-end technology--materials processing and modelling, symposium held April 13-15, 1998, San Francisco, California, U.S.A.. pp.43-, 1998. Warrendale, Pa.. MRS - Materials Research Society