Sugiyama, M. ; Nakajima, T. ; Tanaka, T. ; Itoh, H. ; Aoyama, J. ; Egashira, Y. ; Yamashita, K. ; Komiyama, H. ; Shimogaki, Y.
出版情報:
Interconnect and contact metallization for ULSI : proceedings of the international symposium. pp.56-67, 1999. Pennington, N.J.. Electrochemical Society
Tadatomo, K. ; Ohuchi, Y. ; Okagawa, H. ; Itoh, H. ; Miyake, H. ; Hiramatsu, K.
出版情報:
GaN and related alloys : symposium held November 30-December 4, 1998, Boston, Massachusetts, U.S.A.. pp.G3.1.1-, 1999. Warrendale, Pa.. MRS - Materials Research Society
Kurokawa, A. ; Maeda, T. ; Sakamoto, K. ; Itoh, H. ; Nakamura, K. ; Koike, K. ; Moon, D. W. ; Ha, Y. H. ; Ichimura, S. ; Ando, A.
出版情報:
Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A.. pp.21-, 1999. Warrendale, PA. MRS - Materials Research Society
Functionally graded materials 1998 : proceedings of the 5th International Symposium on Functionally Graded Materials, held in New Town Hall, Dresden, Germany, October 26-29, 1998. pp.344-349, 1999. Uetikon-Zuerich, Switzerland. Trans Tech Publications