Nakayama, Y. ; Akita, S. ; Itoh, H. ; Yajima, T. ; Nakano, M. ; Kawamura, T.
出版情報:
Amorphous silicon technology, 1989 : symposium held April 25-28, 1989, San Diego, California, U.S.A.. pp.643-648, 1989. Pittsburgh, Pa.. Materials Research Society
Murakami, K. ; Itoh, H. ; Tohmiya, Y. ; Takita, K. ; Masuda, K.
出版情報:
Energy beam-solid interactions and transient thermal processing : symposium held November 1983 in Boston, Massachusetts, U.S.A.. pp.167-172, 1984. New York. North-Holland