Haynes, T. E. ; Han, C. C. ; Lau, S. S. ; Picraux, S. T. ; Chu, W. K.
出版情報:
Rapid thermal processing of electronic materials : symposium held April 21-23, 1987, Anaheim California, U.S.A.. pp.381-386, 1987. Pittsburgh, Pa.. Materials Research Society
Haynes, T. E. ; Picraux, S. T. ; Lee, S. R. ; Chu, W. K.
出版情報:
Fundamentals of beam-solid interactions and transient thermal processing : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A.. pp.713-718, 1988. Pittsburgh, Pa.. Materials Research Society