STRUCTURE OF Al-N FILMS DEPOSITED BY A QUANTITATIVE DUAL ION BEAM PROCESS
- 著者名:
- 掲載資料名:
- Ion implantation and ion beam processing of materials : symposium held November 1983 in Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 27
- 発行年:
- 1984
- 開始ページ:
- 519
- 終了ページ:
- 524
- 総ページ数:
- 6
- 出版情報:
- New York: North-Holland
- ISSN:
- 02729172
- ISBN:
- 9780444008695 [0444008691]
- 言語:
- 英語
- 請求記号:
- M23500/27
- 資料種別:
- 国際会議録
類似資料:
Materials Research Society |
Materials Research Society |
SPIE - The International Society of Optical Engineering |
8
国際会議録
CHARACTERIZATION AND PERFORMANCE OF CARBON FILMS DEPOSITED BY PLASMA AND ION BEAM BASED TECHNIQUES
MRS - Materials Research Society |
Trans Tech Publications |
9
国際会議録
MICROSTRUCTURE OF NIOBIUM FILMS ORIENTED BY NON-NORMAL INCIDENCE ION BOMBARDMENT DURING GROWTH
Materials Research Society |
Materials Research Society |
MRS - Materials Research Society |
SPIE - The International Society of Optical Engineering |
Materials Research Society |
SPIE-The International Society for Optical Engineering |
Kluwer Academic Publishers |