Ghaderi, K. ; Hobler, G. ; Budil, M. ; Poetzl, H. ; Pichler, P. ; Ryssel, H. ; Hansch, W. ; Eisele, I. ; Tian, C. ; Stingeder, G.
出版情報:
Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology. pp.613-624, 1994. Pennington, NJ. Electrochemical Society
Ultraclean semiconductor processing technology and surface chemical cleaning and passivation : Symposum held April 17-19, 1995, San Francisco, California, USA. pp.345-, 1995. Pittsburgh, PA. MRS - Materials Research Society