Gao, L. ; Gstottner, J. ; Emling, R. ; Linsmeier, Ch. ; Balden, M. ; Wiltner, A. ; Hansch, W. ; Schmitt-Landsiedel, D.
出版情報:
Materials, technology and reliability for advanced interconnects and low-k dielectrics - 2004 : symposium held April 13-15, 2004, San Francisco, California, U.S.A.. pp.255-260, 2004. Warrendale. Materials Research Society
Gao, L. ; Gstoettner, J. ; Emling, R. ; Wang, P. ; Hansch, W. ; Schmitt-Landsiedel, D.
出版情報:
Materials, technology and reliability for advanced interconnects and low-k dielectrics - 2004 : symposium held April 13-15, 2004, San Francisco, California, U.S.A.. pp.185-190, 2004. Warrendale. Materials Research Society