1.

国際会議録
国際会議録
1. Monitoring of Mobile Sodium Ions in SiQ Using Corona Charging
Stevie,F.A. ; Persson,E. ; DeBusk,D.K. ; Savchuk,A. ; Hoff,A.M. ; Edelman,P. ; Lagowski,J.
出版情報: Proceedings of the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices.  pp.357-364,  1997.  Pennington, NJ.  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3322
2.

国際会議録
国際会議録
2. Mobile charge testing of sodium-contaminated thermal oxides using corona temperature stressing
Hoff,A.M. ; DeBusk,D.K.
出版情報: In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing.  pp.26-34,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3215