Tardif, F. ; Raccurt, O. ; Barbe, J.C. ; De Crecy, F. ; Besson, P. ; Danel, A.
出版情報:
Cleaning technology in semiconductor device manufacturing VIII : proceedings of the international symposium. pp.153-160, 2003. Pennington, NJ. Electrochemical Society
Perrut, V. ; Danel, A. ; Millet, C. ; Daviot, J. ; Rignon, M. ; Tardif, F.
出版情報:
Cleaning technology in semiconductor device manufacturing VIII : proceedings of the international symposium. pp.246-253, 2003. Pennington, NJ. Electrochemical Society
Millet, C. ; Daviot, J. ; Danel, A. ; Perrut, V. ; Tardif, F. ; Broussous, L. ; Renault, O.
出版情報:
Cleaning technology in semiconductor device manufacturing VIII : proceedings of the international symposium. pp.271-278, 2003. Pennington, NJ. Electrochemical Society
Shanmugasundaram, K. ; Chang, K. ; Shallenberger, J. ; Danel, A. ; Tardif, F. ; Ruzyllo, J.
出版情報:
Cleaning technology in semiconductor device manufacturing VIII : proceedings of the international symposium. pp.348-355, 2003. Pennington, NJ. Electrochemical Society
Pic, N. ; Polignano, M.L. ; Caputo, D. ; Salva, G. ; Sardo, M. ; Danel, A.
出版情報:
Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah. pp.505-515, 2003. Pennington, NJ. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Crystalline defects and contamination: their impact and control in device manufacturing IV : DECON 2005 : proceedings of the Satellite Symposium to ESSDERC 2005, Grenoble, France. pp.72-80, 2005. Pennington, N.J.. Electrochemical Society
Pic, N. ; Polignano, M.L. ; Caputo, D. ; Salva, G. ; Sardo, M. ; Danel, A.
出版情報:
Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah. pp.505-515, 2003. Pennington, NJ. Electrochemical Society