Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II. pp.376-384, 1997. Pennington, NJ. Electrochemical Society
Photo-induced space charge effects in semiconductors: electro-optics, photoconductivity, and the photorefractive effect : symposium held April 29-May 1, 1992, San Francisco, California, U.S.A.. pp.235-240, 1992. Pittsburgh, Pa.. Materials Research Society
Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.495-504, 1994. Pennington, NJ. Electrochemical Society
Liu, H. X. ; Schneider, T. P. ; Montgomery, J. ; Chen, Y. L. ; Buczkowski, A. ; Shimura, F. ; Nemanich, R. J. ; Maher, D. M. ; Korzec, D. ; Engemann, J.
出版情報:
Surface chemical cleaning and passivation for semiconductor processing. pp.231-, 1993. Pittsburgh, PA. MRS - Materials Research Society
Proceedings of the Symposium on the Degradation of Electronic Devices due to Device Operation as well as Crystalline and Process-Induced Defects. pp.265-274, 1994. Pennington, NJ. Electrochemical Society
Proceedings of the Symposium on the Degradation of Electronic Devices due to Device Operation as well as Crystalline and Process-Induced Defects. pp.157-166, 1994. Pennington, NJ. Electrochemical Society
Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing II. pp.1-14, 1994. Pennington, NJ. Electrochemical Society
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