Marchman, H. ; Taylor, D. ; Hadisutjipto, S. ; Mackay, S. ; Cottle, R. ; Maltabes, J. ; Brown, J.
出版情報:
Photomask and Next-Generation Lithography Mask Technology XIII. pp.628311-628311, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering