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Direct Simulation Monte Carlo (DSMC) of Low-Pressure Semicon- ductor Manufacturing Processes

著者名:
掲載資料名:
Proceedings of the eleventh International Symposium on Plasma Processing
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
96-12
発行年:
1996
開始ページ:
70
終了ページ:
82
総ページ数:
13
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771641 [1566771641]
言語:
英語
請求記号:
E23400/962354
資料種別:
国際会議録

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