Hatanaka, Y. ; Noda, D. ; Niraula, M. ; Aoki, T. ; Nakanishi, Y.
出版情報:
Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11. pp.1027-1033, 1997. Pennington, NJ. Electrochemical Society
Aoki, T. ; Ogishima, T. ; Nakanishi, Y. ; Hatanaka, Y. ; Wrobel, A.M.
出版情報:
Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11. pp.1207-1214, 1997. Pennington, NJ. Electrochemical Society
Yamada, I. ; Matsuo, J. ; Jones, E. C. ; Takeuchi, D. ; Aoki, T. ; Goto, K. ; Sugii, T.
出版情報:
Materials modification and synthesis by ion beam processing : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A.. pp.363-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Taniguchi, K. ; Saito, T. ; Xia, J. ; Kim, R. ; Aoki, T. ; Kobayashi, H. ; Kamakura, Y.
出版情報:
Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A.. pp.155-, 1999. Warrendale, PA. MRS - Materials Research Society
Kobayashi, S. ; Iizuka, M. ; Aoki, T. ; Mikoshiba, N. ; Sakuraba, M. ; Matsuura, T. ; Murota, J.
出版情報:
Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A.. pp.265-, 1999. Warrendale, PA. MRS - Materials Research Society
Xu, Y-Y. ; Muramatsu, T. ; Aoki, T. ; Nakanishi, Y. ; Hatanaka, Y.
出版情報:
Plasma deposition and treatment of polymers : symposium held November 30-December 2, 1998, Boston, Massachusetts, U.S.A.. pp.185-, 1999. Warrendale, Pa.. MRS - Materials Research Society
Silicon front-end technology--materials processing and modelling, symposium held April 13-15, 1998, San Francisco, California, U.S.A.. pp.147-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Low-dielectric constant materials V : symposium held April 5-8, 1999, San Francisco, California, U.S.A.. pp.41-48, 1999. Warrendale, Pa.. Materials Research Society
Seki, T. ; Tanomura, M. ; Aoki, T. ; Matsuo, J. ; Yamada, I.
出版情報:
Atomistic mechanisms in beam synthesis and irradiation of materials : symposium held December 1-2, 1997, Boston, Massachusetts, U.S.A.. pp.93-, 1999. Warrendale, Pa.. MRS - Materials Research Society
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