Taneya, M. ; Sugimoto, Y. ; Hidaka, H. ; Akita, K.
出版情報:
In-situ patterning : selective area deposition and etching : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A.. pp.211-216, 1990. Pittsburgh, Pa.. Materials Research Society
Machida, K. ; Akita, K. ; Ohno, K. ; Moriya, M. ; Nishida, H. ; Ohsawa, I.
出版情報:
iSAIRAS '99 : Fifth International Symposium on Artificial Intelligence, Robotics and Automation in Space, ESTEC, Noordwijk, the Netherlands, 1-3 June 1999. pp.319-328, 1999. Noordwijk, Netherlands. ESA Publications Division
Matsuhira, N. ; Asakura, M. ; Shinomiya, Y. ; Machida, K. ; Tanie, K. ; Nishida, H. ; Bamba, H. ; Akita, K.
出版情報:
iSAIRAS '99 : Fifth International Symposium on Artificial Intelligence, Robotics and Automation in Space, ESTEC, Noordwijk, the Netherlands, 1-3 June 1999. pp.397-402, 1999. Noordwijk, Netherlands. ESA Publications Division