Characterization of SiGe/Ge heterostructures and graded layers using variable angle spectroscopic ellipsometry

Characterization of SiGe/Ge heterostructures and graded layers using variable angle spectroscopic ellipsometry

著者名:

Croke, E. T. ( Hughes Research Labs. )
Wang, K. L. ( California Univ. )
Heyd, A. R. ( NASA Lewis Research Center )
Alterovitz, S. A. ( NASA Lewis Research Center )
Lee, C. H. ( California Univ. )

掲載資料名:

NASA Technical Reports

発行年:

1996

巻:

19960038261

号:

NASA-TM-111685

パート:

NAS 1.15:111685

ペーパー番号:

N96-30741

開始ページ:

1

終了ページ:

8

総ページ数:

8

出版情報:

National Aeronautics and Space Adminstration

言語:

英語

資料種別:

テクニカルペーパー

詳細

TDL書誌ID:

ZA00001432

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