PREPARATION DE COUCHES MINCES D'OXYNITURE DE SILICIUM PAR RECVD EN VUE DE GREFFAGE CHIMIQUE. APPLICATION A UN ISFET PH
- 著者名:
CLECHET, P. CROS, Y. FOMBON, J.J. JAFFREZIC, N. MARTIN, J.C. ROBERT, J.L. VEDEL, J. - 掲載資料名:
- NASA Technical Reports
- 発行年:
- 1991
- 通号:
- N93-11574
- ペーパー番号:
- N93-11574
- 開始ページ:
- 1
- 終了ページ:
- 118
- 総ページ数:
- 118
- 出版情報:
- National Aeronautics and Space Adminstration
- 言語:
- フランス語
- 資料種別:
- テクニカルペーパー
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