DIFFUSION BARRIERS IN SEMICONDUCTOR CONTACT METALIZATION.
- 著者名:
- Kattelus, H. ( TECH. RES. CENTRE OF FINLAND, ESPOO )
- 掲載資料名:
- NASA Technical Reports(N89)
- 発行年:
- 1988
- 号:
- VTT-RR-48
- ペーパー番号:
- N89-15764
- 開始ページ:
- 1
- 終了ページ:
- 125
- 総ページ数:
- 125
- 出版情報:
- National Aeronautics and Space Administration
- 言語:
- 英語
- 資料種別:
- テクニカルペーパー
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