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High-Quality Silicon Films Prepared by Zone-Melting Recrystallization

著者名:
  • Chen, C. K. ( Lincoln Laboratory, Massachusetts Institute of Technology )
  • Geis, M. W. ( Lincoln Laboratory, Massachusetts Institute of Technology )
  • Tsaur, B-Y ( Lincoln Laboratory, Massachusetts Institute of Technology )
  • Fan, C. C. ( Lincoln Laboratory, Massachusetts Institute of Technology )
掲載資料名:
NASA Technical Reports
発行年:
1984
号:
NASA-CR-173746
通号:
G3/76 19875
パート:
NAS 1.26:173746
ペーパー番号:
N84-28638
開始ページ:
1
終了ページ:
18
総ページ数:
18
出版情報:
National Aeronautics and Space Administration
言語:
英語
資料種別:
テクニカルペーパー

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