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SEM and ECC Imaging Study of Step-Bunched Structure on 4H-SiC Epitaxial Layers

著者名:
Y. Tabuchi
M. Sonoda
K. Ashida
T. Kaneko
N. Ohtani
M. Katsuno
S. Sato
H. Tsuge
T. Fujimoto
さらに 4 件
掲載資料名:
Silicon Carbide and Related Materials 2016
シリーズ名:
Materials science forum
シリーズ巻号:
897
発行年:
2017
開始ページ:
205
終了ページ:
208
総ページ数:
4
出版情報:
Aedermannsdorf, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9783035710434 [3035710430]
言語:
英語
請求記号:
M23650
資料種別:
国際会議録

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