Effect of Temperature on the Microstructure and Electrical Conductivity of Microcrystalline Si Films

Effect of Temperature on the Microstructure and Electrical Conductivity of Microcrystalline Si Films

著者名:

掲載資料名:

Material Engineering and Smart Materials

シリーズ名:

Materials science forum

シリーズ巻号:

895

発行年:

2017

開始ページ:

28

終了ページ:

32

総ページ数:

5

出版情報:

Aedermannsdorf, Switzerland: Trans Tech Publications

ISSN:

02555476

ISBN:

9783038357360 [3038357367]

言語:

英語

請求記号:

M23650

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00066567
シリーズID:	PA00000012

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