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The Mechanical Properties of TiN Films Grown by a Pure N2 Plasma Sputtering

著者名:
B.S. Jang
C.H. Lee
J.W. Choi
J.S. Kwon
H.K. Kim
C.H. Park
H.M. Kim
さらに 2 件
掲載資料名:
Advanced Materials Design and Mechanics IV
シリーズ名:
Materials science forum
シリーズ巻号:
878
発行年:
2017
開始ページ:
89
終了ページ:
95
総ページ数:
7
出版情報:
Aedermannsdorf, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9783035710601 [3035710600]
言語:
英語
請求記号:
M23650
資料種別:
国際会議録

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