Chemical Mechanical Polishing on Extremely Low Expansion Glass Ceramic Wafers
- 著者名:
Z.F. Shi Z.Y. Zhang S.L. Huang B.Y. Yuan X.G. Guo P. Zhou Z.J. Jin - 掲載資料名:
- Advances in Abrasive Technology XIX
- シリーズ名:
- Materials science forum
- シリーズ巻号:
- 874
- 発行年:
- 2016
- 開始ページ:
- 389
- 終了ページ:
- 394
- 総ページ数:
- 6
- 出版情報:
- Aedermannsdorf, Switzerland: Trans Tech Publications
- ISSN:
- 02555476
- ISBN:
- 9783035710342 [3035710341]
- 言語:
- 英語
- 請求記号:
- M23650
- 資料種別:
- 国際会議録
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